1. N. Collaert, S. Brus, A. De Keersgieter, A. Dixit, I. Ferain, M. Goodwin, A. Kottantharayil, R. Rooyackers, P. Verheyen, Y. Yim, P. Zimmerman, S. Beckx, B. Degroote, M. Demand, M. Kim, E. Kunnen, S. Locorotondo, G. Mannaert, F. Neuilly, D. Shamiryan, C. Baerts, M. Ercken, D. Laidler, F. Leys, R. Loo, J. Lisoni, J. Snow, R. Vos, W. Boullart, I. Pollentier, S. De Gendt, K. De Meyer, M. Jurczak, and S. Biesemans, in Proceedings of the International Conference on Integrated Circuit and Technology, 2005, p. 187.
2. New doping method for subhalf micron trench sidewalls by using an electron cyclotron resonance plasma
3. W. Vandervorst, P. Eyben, J. Mody, M. Jurczak, N. D. Nguyen, S. Takeuchi, F. Leys, R. Loo, M. Caymax, J. L. Everaert, J. I. del Agua Borniquel, T. Poon, and M. A. Foad, in Proceedings of the 17th IIT, 2008, p. 81.
4. Y. Sasaki, K. Okashita, S. Hayashi, K. Nakamoto, T. Kitaoka, B. Mizuno, M. Kubota, M. Ogura, and O. Nishijima, Program and Abstract of the 18th IIT, p. Mo–13, 2010.