Origin of simultaneous enhancement of work function and carrier concentration in In2O3 films by excimer-laser irradiation
Author:
Affiliation:
1. Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
Funder
Ministry of Economy, Trade and Industry
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0041353
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