Improvement on thermal stability for indium gallium zinc oxide by oxygen vacancy passivation with supercritical fluid cosolvent oxidation

Author:

Ruan Dun-Bao1ORCID,Liu Po-Tsun2ORCID,Gan Kai-Jhih1ORCID,Hsu Chih-Chieh1,Chiu Yu-Chuan2,Lin Chia-Yu2,Sze Simon M.1

Affiliation:

1. Department of Electronics Engineering and Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan

2. Department of Photonics and Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University, Hsinchu, Taiwan

Funder

Ministry of Science and Technology, Taiwan

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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4. C. H. Shen , J. M. Shieh , W. H. Huang , T. T. Wu , C. F. Chen , M. H. Kao , C. C. Yang , C. D. Lin , H. H. Wang , T. Y. Hsieh , B. Y. Chen , G. W. Huang , M. F. Chang , and F. L. Yang , in International Electron Devices Meeting ( Institute of Electrical and Electronica Engineers, 2014), p. 3.6.1.

5. H. Wei , T. F. Wu , D. Sekar , B. Cronquist , R. F. Pease , and S. Mitra , in International Electron Devices Meeting ( Institute of Electrical and Electronica Engineers, 2012), p. 14.2.1.

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