Effects of ion energy on the crystal size and hydrogen bonding in plasma-deposited nanocrystalline silicon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1913803
Reference50 articles.
1. Microcrystalline n-i-p solar cells deposited at 10Å/s by VHF-GD
2. Microcrystalline silicon: An emerging material for stable thin-film transistors
3. Polycrystalline Silicon Thin-Film Transistors
4. Triple-junction amorphous silicon alloy solar cell with 14.6% initial and 13.0% stable conversion efficiencies
5. Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements
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