Optimal design of SiC piezoresistive pressure sensor considering material anisotropy

Author:

Wu Chen12,Fang Xudong123ORCID,Guo Xin12,Zhao Libo12ORCID,Tian Bian12ORCID,Jiang Zhuangde12

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China

2. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China

3. State Key Laboratory of Robotics and System (HIT), Harbin 150001, China

Funder

China Postdoctoral Science Foundation

The National Natural Science Foundation of China

The State Key Laboratory for Manufacturing Systems Engineering

The State Key Laboratory of Robotics and System

Shaanxi Natural Science Foundation

Shaanxi Postdoctoral Science Foundation

Fundamental Research Funds for the Central Universities

National Key Research and Development (R&D) plan

The 111 Program

New Teacher Research Program of Xi’an Jiaotong University

The Recruitment Program of Global Experts

Publisher

AIP Publishing

Subject

Instrumentation

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