Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference45 articles.
1. A comprehensive review of recent progress, prospect and challenges of silicon carbide and its applications;Manikandan;Silicon,2022
2. Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications;Wu;IEEE Sensor. J.,2006
3. Piezoresistive Pressure Sensors for Applications in Harsh Environments—A Roadmap[M]//Modern Sensing Technologies;Ngo,2019
4. Optimal design of SiC piezoresistive pressure sensor considering material anisotropy;Wu;Rev. Sci. Instrum.,2020
5. Advances in silicon carbide science and technology at the micro- and nanoscales;Maboudian;J. Vacuum Sci. Technol. A Vacuum Surfaces Films,2013
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