Author:
Zorman Christian A.,Parro Rocco J.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference174 articles.
1. A. D. Kurtz, T. A. Nunn, and R. A. Weber, US Patent #4,672,354 (1987).
2. A. Lloyd Spetz and S. Savage, in: Silicon Carbide – Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer‐Verlag, Berlin, Heidelberg, 2003), p. 869.
3. SiC sensors: a review
4. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
5. R. Cheung, Silicon Carbide Microelectromechanical Systems for Harsh Environments (Imperial College Press, London, 2006).
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