Investigation of boron diffusion in 6H-SiC
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1598622
Reference8 articles.
1. Modeling of Boron Diffusion in Silicon Carbide
2. Transient enhanced diffusion of implanted boron in 4H-silicon carbide
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