Affiliation:
1. State Key Laboratory of Silicon and Advanced Semiconductor Materials & School of Materials Science and Engineering, Zhejiang University 1 , Hangzhou, Zhejiang 310027, China
2. Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University 2 , Hangzhou, Zhejiang 311215, China
Abstract
4H Silicon carbide (SiC) is widely recognized as one of the most advanced wide bandgap semiconductors used in the production of high-efficiency power electronic devices. Impurities play a crucial role in achieving the desired electrical properties in 4H-SiC, yet the understanding of impurities in this material remains limited. In this study, first-principles formation-energy calculations were employed to establish a comprehensive database of formation-energy diagrams for impurities in 4H-SiC. This database includes valuable information on site preference, lattice distortion, solubility, and charge transition levels (CTLs) of the impurities. The site preference for each impurity is closely related to factors such as the Fermi energy, chemical potential, and the impurity species itself. To assess the lattice distortion caused by each impurity, a comparison was made between the volume changes before and after doping. Moreover, the solubility of each impurity was determined using the detailed balance theory, thereby enabling a direct measure of the maximum impurity concentration achievable in the material. Based on the CTLs, the impurities in 4H-SiC were classified into four categories: n-type impurities, p-type impurities, amphoteric impurities, and non-electroactive impurities. This comprehensive property database for impurities in 4H-SiC provides valuable insights for tailoring the material properties through controlled doping, thereby ultimately leading to enhanced performance of power electronic devices.