Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line-Reference-Cited by-同舟云学术

Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line

Published:2010-01 Issue:10 Volume:24 Page:1461-1470
ISSN:0169-1864
Container-title:Advanced Robotics
language:en
Short-container-title:Advanced Robotics

Author:

Noda Daiji¹,Hattori Tadashi²

Affiliation:

1. a Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan;, Email: noda@lasti.u-hyogo.ac.jp

2. b Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan

Publisher

Informa UK Limited

Subject

Computer Science Applications,Hardware and Architecture,Human-Computer Interaction,Software,Control and Systems Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1163/016918610X505567

Reference11 articles.

1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

2. Low-cost HARMS process

3. LIGA process – micromachining technique using synchrotron radiation lithography – and some industrial applications

4. Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil

5. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

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2. Digital LIGA: exploitation of droplet-on-demand inkjet printing to fabricate complex mechanical structures by electroforming;Journal of Micromechanics and Microengineering;2023-05-22