Author:
Malek Chantal Khan,Saile Volker
Reference230 articles.
1. Production of separation nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics;Becker;Naturwissenschaften,1982
2. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process);Becker;J. Microelectron. Engng.,1986
3. Fundamentals of Microfabrication;Madou,1997
4. C.R. Friedrich, High aspect ratio processing, in: P. Rai-Choudhury (Ed.), Handbook of Microlithography, Micromachining and Microfabrication, vol. 2: Micromachining and Microfabrication, SPIE Press Monograph, PM 39, 1997, pp. 299–377, Chapter 6.
5. Microsystem Technology;Menz,2001
Cited by
214 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献