Electrical characteristic fluctuation of 16-nm-gate high-κ/metal gate bulk FinFET devices in the presence of random interface traps

Author:

Hsu Sheng-Chia,Li Yiming

Publisher

Springer Science and Business Media LLC

Subject

Condensed Matter Physics,General Materials Science

Reference29 articles.

1. Li Y, Cheng HW, Chiu YY, Yiu CY, Su HW: A unified 3D device simulation of random dopant, interface trap and work function fluctuations on high-κ/metal gate device. In Proceedings of the IEEE International Electron Devices Meeting. Washington, DC: IEEE; 2011:107–110.

2. Cheng HW, Li FH, Han MH, Yiu CY, Yu CH, Lee KF, Li Y: D device simulation of work-function and interface trap fluctuations on high-κ/metal gate devices. In Proceedings of the International Electron Devices Meeting. San Francisco: IEEE; 2010:379–382.

3. Wang X, Brown AR, Cheng B, Asenov A: Statistical variability and reliability in nanoscale FinFETs. In Proceedings of the International Electron Devices Meeting. Washington, DC: IEEE; 2011:103–106.

4. Penumatcha AV, Swandono S, Cooper JA: Limitations of the high-low C-V technique for MOS interfaces with large time constant dispersion. IEEE Trans Electron Devices 2013, 60: 923–926.

5. Li Y, Cheng HW, Chiu YY: Interface traps and random dopants induced characteristic fluctuations in emerging MOSFETs. Microelectron Eng 2011, 88: 1269–1271. 10.1016/j.mee.2011.03.040

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