Author:
Dorranian Davoud,Dejam Laya,Mosayebian Gelareh
Abstract
Abstract
Swanepoel method is employed for spectroscopic determination of optical properties of Cu3N thin film using transmittance data. Investigated films have been deposited using reactive magnetron sputtering system. Deposition time was 9 to 21 min. Refractive index, absorption coefficient, and bandgap energy of the samples are determined. Thickness of the films is calculated by Swanepoel method, and result is compared with the thickness of the films measured by profilmeter. It is shown that Swanepoel method is a reliable way to calculate the optical constants of thin films when the transmittance spectrum of the film is influenced by wavelike patterns due to reflection of the probe beam from different interfaces.
Publisher
Springer Science and Business Media LLC
Subject
Physics and Astronomy (miscellaneous)
Reference12 articles.
1. Dorranian D, Dejam L, Sari AH, Hojabri A: Effect of nitrogen content on optical constants of copper nitride thin films prepared by DC magnetron reactive sputtering:. JTA Phys. 2009, 3: 37–41.
2. Benjemaa N, Abdi REI, Carvou E: Numerical and experimental study of the contact resistance for high copper alloys in force domain 1–100N. Eur Phys. J. Appl. Phys. 2010, 49: 22906. 10.1051/epjap/2009208
3. Gallardo Vega C, De la Cruz D: Study of the Structure and Electrical Properties of the Copper Nitride Thin Films Deposited by Pulsed Laser Deposition. Appl. Surf. Sci. 2006, 252: 8001–8004. 10.1016/j.apsusc.2005.10.007
4. Du Y, Ji AL, Ma LB, Wang YQ, Cao ZX: Electrical conductivity and photoreflectance of nanocrystalline copper nitride thin films deposited at low temperature. J. Crystal Growth 2005, 280: 490–494. 10.1016/j.jcrysgro.2005.03.077
5. Dorranian D, Dejam L, Sari AH, Hojabri A: Structural and optical properties of copper nitride thin films in a reactive Ar/N2 magnetron sputtering system. Eur. Phys. J. Appl. Phys. 2010, 50: 20503. 10.1051/epjap/2010040
Cited by
42 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献