Band alignment and optical properties of (ZrO2)0.66(HfO2)0.34 gate dielectrics thin films on p-Si (100)-Reference-Cited by-同舟云学术

Band alignment and optical properties of (ZrO₂)_0.66(HfO₂)_0.34 gate dielectrics thin films on p-Si (100)

Published:2011 Issue:3 Volume:17 Page:203-207
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Shin Hye Chung¹,Son Lee Seul¹,Kim Kyeom Ryong¹,Oh Suhk Kun¹,Kang Hee Jae¹,Tahir Dahlang²,Heo Sung³,Chung Jae Gwan³,Lee Jae Cheol³,Tougaard Sven⁴

Affiliation:

1. Department of Physics, Chungbuk National University

2. Department of Physics, Hasanuddin University

3. Analytical Engineering Center, Samsung Advanced Institute of Technology

4. Department of Physics and Chemistry, University of Southern Denmark

Publisher

Surface Analysis Society of Japan

Link

https://www.jstage.jst.go.jp/article/jsa/17/3/17_203/_pdf

Reference17 articles.

1. [1] M. Schulz, Nature 399, 729 (1999).

2. [2] G. D. Wilk and R. M. Wallace, Appl. Phys. Lett. 76,112 (2000).

3. [3] M.- H. Cho, H. S. Chang, Y. J. Cho, D. W. Moon, K. H. Min, R. Sinclair, S. K. Kang, D. H. Ko, J. H. Lee, J. H. Gu, and N. I. Lee, Surf. Sci. 554, 75 (2004).

4. [4] C. Zhao, T. Witters, P. Breimer, J. Maes, M. Caymax, and S. De Gendt, Microelectron Eng. 84, 7 (2007).

5. [5] Y. Yamamoto, K. Kita, K. Kyuno, and A. Toriumi, Appl. Phys. Lett. 89, 032903 (2006).

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