1. Muller, D. A. et al. Nature 399, 758–761 (1999).
2. Lilienfeld, J. E. US patent 174175 (1925).
3. Kahng, D. & Atalla, M. US patents 3206670 & 3102230 (1960).
4. Moore, G. E. in Int. Elec. Devices Mtg (IEDM) Technical Digest 75 11 (IEEE, Piscataway, New Jersey, 1975).
5. Mueller, H. H. & Schulz, M. J. Appl. Phys. 83, 1734–1741 (1998).