Optical and mechanical properties of nanolaminates of zirconium and hafnium oxides grown by atomic layer deposition
Author:
Affiliation:
1. Institute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, Estonia
2. Department of Chemistry, University of Helsinki, P.O. Box 55, FI-00014 Helsinki, Finland
Funder
Estonian Research Agency
European Regional Development Fund
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5131563
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