1. A. I. Kuz’michev, Magnetron Sputtering Systems (Kyivsk. Politekh. Univ., Kyiv, 2004).
2. A. Richer, Thin Solid Films 188, 272 1990.
3. V. V. Zhukov, V. P. Krivobokov, and S. N. Yanin, Tech. Phys. 51, 453 2006.
4. G. A. Bleykher and V. P. Krivobokov, Solid Surface Erosion under Intense Discharge Particle Beams (Nauka, Novosibirsk, 2014).
5. G. A. Bleykher and V. P. Krivobokov, Instrum. Methods Phys. Res. B 292, 34 2012.