Sputtering of the magnetron diode target in the presence of an external ion beam

Author:

Zhukov V. V.,Krivobokov V. P.,Yanin S. N.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Reference10 articles.

1. B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982) [in Russian].

2. V. S. Fomenko, Emission Properties of Materials: A Handbook (Naukova Dumka, Kiev, 1981) [in Russian].

3. Sputtering by Particle Bombardment, Ed. by R. Behrisch (Springer, New York, 1991; Mir, Moscow, 1998), Vol. 2.

4. V. V. Zhukov, V. P. Krivobokov, and S. N. Yanin, Izv. Tomsk. Politekh. Univ. 307(7), 40 (2004).

5. V. V. Malov, Piezoelectric Transducers (Energiya, Moscow, 1978) [in Russian].

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