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3. Sputtering by Particle Bombardment, Ed. by R. Behrisch (Springer, New York, 1991; Mir, Moscow, 1998), Vol. 2.
4. V. V. Zhukov, V. P. Krivobokov, and S. N. Yanin, Izv. Tomsk. Politekh. Univ. 307(7), 40 (2004).
5. V. V. Malov, Piezoelectric Transducers (Energiya, Moscow, 1978) [in Russian].