Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam-Reference-Cited by-同舟云学术

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Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam

Published:2021-12 Issue:S1 Volume:15 Page:S150-S156
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Surf. Investig.

Author:

Smirnova M. A.,Bachurin V. I.,Mazaletsky L. A.,Pukhov D. E.,Churilov A. B.,Rudy A. S.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

https://link.springer.com/content/pdf/10.1134/S1027451022020380.pdf

Reference32 articles.

1. M. A. Makeev, R. Cuerno, and A. Barbasi, Nucl. Instrum. Methods Phys. Res., Sect. B 197, 185 (2002). https://doi.org/10.1016/S0168-583X(02)01436-2

2. U. Valbusa, C. Borgano, and F. Mongeot, J. Phys.: Condens. Matter 14, 8153 (2002). https://doi.org/10.1088/0953-8984/14/35/301

3. J. Munoz-Garcia, L. Vazquez, M. Castro, et al., Mater. Sci. Eng. R 86, 1 (2014). https://doi.org/10.1016/j.mser.2014.09.001

4. K. Wittmaack, Surf. Interface Anal. 29, 721 (2000). https://doi.org/10.1002/1096-9918(200010)29:10%3C721::AID-SIA916%3E3.0.CO;2-Q

5. V. I. Bachurin, P. A. Lepshin, and V. K. Smirnov, Vacuum 56, 241 (2000). https://doi.org/10.1016/S0042-207X(99)00194-3

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1. Investigation of Ripple Formation on Surface of Silicon by Low-Energy Gallium Ion Bombardment;Nanomaterials;2024-06-29

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