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Self-organized nanopatterning of silicon surfaces by ion beam sputtering

  • Published:2014-12 Issue: Volume:86 Page:1-44
  • ISSN:0927-796X
  • Container-title:Materials Science and Engineering: R: Reports
  • language:en
  • Short-container-title:Materials Science and Engineering: R: Reports

Author:

Muñoz-García Javier,Vázquez Luis,Castro Mario,Gago Raúl,Redondo-Cubero Andrés,Moreno-Barrado Ana,Cuerno Rodolfo

Funder

Spanish Ministries of Science and Innovation

Economy and Competitiveness

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference304 articles.

1. Proc. Intl. Conf. Prod. Eng.;Taniguchi,1974

2. Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

3. Toward Functional Nanomaterials;Muñoz-García,2009

4. Nanofabrication by Ion-beam Sputtering: Fundamentals and Applications;Som,2012

5. Silicon nanostructures for photonics

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