Optical properties of silicon carbonitride films produced by plasma-induced decomposition of organic silicon compounds
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Published:2015-07
Issue:4
Volume:49
Page:273-281
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ISSN:0018-1439
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Container-title:High Energy Chemistry
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language:en
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Short-container-title:High Energy Chem
Author:
Fainer N. I.,Nemkova A. A.
Publisher
Pleiades Publishing Ltd
Subject
Physical and Theoretical Chemistry
Reference28 articles.
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