Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
Author:
Publisher
Pleiades Publishing Ltd
Subject
General Chemistry
Link
http://link.springer.com/content/pdf/10.1134/S1070363219110203.pdf
Reference13 articles.
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5. Cross, T.J., Raj, R., Prasad, S.V., and Tallant, D.R., Int. J. Appl. Ceram. Technol., 2006, vol. 3, no. 2, p. 113. https://doi.org/10.1111/j.1744-7402.2006.02070.x
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