Subject
General Physics and Astronomy
Cited by
9 articles.
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1. Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films;Heliyon;2024-08
2. Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering;Applied Surface Science Advances;2024-02
3. Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture;Russian Journal of General Chemistry;2019-11
4. Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen;Glass Physics and Chemistry;2018-11
5. The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride;Journal of Structural Chemistry;2016-11