Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering-Reference-Cited by-同舟云学术

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Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering

Published:2024-02 Issue: Volume:19 Page:100546
ISSN:2666-5239
Container-title:Applied Surface Science Advances
language:en
Short-container-title:Applied Surface Science Advances

Author:

Aghaei Abbas Ali,Eshaghi Akbar,Ramazani Mazaher,Zabolian Hossein,Abbasi-Firouzjah Marzieh

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces

Reference36 articles.

1. Advances in ultradurable phosphide-based broadband antireflection coatings for sand and rain erosion protection of infrared windows and domes;Gibson;Window Dome Technol. Mater. IV,1994

2. Plasma-enhanced chemical vapor deposition of functional coatings;Martinu,2010

3. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications;Donnet,2008

4. Optical properties of oxygen doped diamond-like carbon thin films;Safaie;J. Alloys Compd.,2016

5. Durable coating for IR windows;Goldman;Int. Soc. Opt. Eng.,2005

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