Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference23 articles.
1. Recent advances in manufactured silicon photonics integrated circuits
2. Comparison Among Various<tex>$hbox Si_3hboxN _4$</tex>Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line
3. Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties
4. High confinement micron-scale silicon nitride high Q ring resonator
5. CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects
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