Peculiarities of the growth kinetics of silicon-germanium alloy layers from silane and germane with an additional heated element in the vacuum chamber-Reference-Cited by-同舟云学术

Peculiarities of the growth kinetics of silicon-germanium alloy layers from silane and germane with an additional heated element in the vacuum chamber

Published:2000-06 Issue:6 Volume:45 Page:770-775
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Orlov L. K.,Potapov A. V.,Ivin S. V.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/1.1259718.pdf

Reference15 articles.

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4. L. T. Vinh, V. Aubry-Fortuna, Y. Zheng, et al., Thin Solid Films 294, 59 (1997).

5. T. R. Bramblett, Q. Lu, N. E. Lee, et al., J. Appl. Phys. 77, 1504 (1995).

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