Defect formation during growth of hydrogenated amorphous silicon
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.47.3661/fulltext
Reference58 articles.
1. Glow-discharge amorphous silicon: Growth process and structure
2. In situ characterization of the growing a-Si:H surface by IR spectroscopy
3. Low Density of Gap States in a-Si:H Deposited by Vacuum UV Direct Photochemical Vapor Deposition Method
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