Solid-phase epitaxy of amorphous silicon induced by electron irradiation at room temperature
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.36.8038/fulltext
Reference21 articles.
1. Ion-beam-induced epitaxial regrowth of amorphous layers in silicon on sapphire
2. Ion beam induced epitaxial crystallisation of silicon
3. Self‐annealing of ion‐implanted silicon: First experimental results
4. On the Dynamic Annealing Mechanism in P+-Implanted Silicon
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