Nonlocal electron kinetics in a planar inductive helium discharge
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.62.7155/fulltext
Reference39 articles.
1. Collisionless electron heating in an inductively coupled discharge
2. Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge
3. Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study
4. Electron‐density and energy distributions in a planar inductively coupled discharge
5. Electron distribution function in a low-pressure inductively coupled plasma
Cited by 77 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography;Advanced Materials Interfaces;2023-12-14
2. Changing pattern of N2 dissociation in N2–Ar RF plasma during E–H mode transition;Plasma Sources Science and Technology;2023-08-01
3. Fluid Simulation of the Plasma Characteristics in an Inductively Coupled Plasma Source with Planar and Cylindrical Coils;Plasma Physics Reports;2023-04
4. A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current;Physics of Plasmas;2023-02-01
5. Effect of mixing CF4 with O2 on electron characteristics of capacitively coupled plasma;Physics of Plasmas;2023-01-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3