Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin
Author:
Funder
European Research Council
NWO
Vidi research program
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevApplied.13.024035/fulltext
Reference28 articles.
1. Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse
2. Extreme ultraviolet lithography: Status and prospects
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4. Physical processes in EUV sources for microlithography
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