Structural, Dielectric, and Interface Properties of Crystalline Barium Silicate Films on Si(100): A Robust High-κMaterial
Author:
Funder
German Academic Exchange Service
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevApplied.5.054006/fulltext
Reference40 articles.
1. High-K materials and metal gates for CMOS applications
2. Ultimate Scaling of High-κ Gate Dielectrics: Higher-κ or Interfacial Layer Scavenging?
3. Characterization of silicate/Si(001) interfaces
4. Interlayer composition of HfO2∕Si(001) films
5. High temperature stability in lanthanum and zirconia-based gate dielectrics
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