Desorption and diffusion at pulsed-laser-melted surfaces: The case of chlorine on silicon
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.55.13904/fulltext
Reference21 articles.
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4. Pulsed laser etching of silicon: Dopant profile modification and dopant desorption induced by surface melting
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