Author:
Kerrien G,Boulmer J,Débarre D,Bouchier D,Grouillet A,Lenoble D
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference22 articles.
1. F. Foulon, in: I.W. Boyd, R.B. Jackman (Eds.), Photochemical Processing of Electronic Materials, Academic Press, New York, 1992, pp. 257–294.
2. I.W. Boyd, in: D.J. Ehrlich, J.Y. Tsao (Eds.), Laser Microfabrication, Academic Press, New York, 1989, pp. 539–580.
3. Fabrication of submicrometer MOSFET's using gas immersion laser doping (GILD)
4. ArF excimer laser doping of boron into silicon
5. Excimer‐laser doping into Si thin films
Cited by
28 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献