Chemical force microscopy for hot-embossing lithography release layer characterization
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2006/SM/B600936K
Reference36 articles.
1. New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
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3. A contribution to the flow behaviour of thin polymer films during hot embossing lithography
4. Transition of MEMS Technology to Nanofabrication
5. Influence of master fabrication techniques on the characteristics of embossed microfluidic channels
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