Transition of MEMS Technology to Nanofabrication-Reference-Cited by-同舟云学术

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Transition of MEMS Technology to Nanofabrication

Published:2005-06-01 Issue:6 Volume:5 Page:864-868
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:J. Nanosci. Nanotech.

Author:

Luesebrink Helge,Glinsner Thomas,Jakeway Stephen C.,Crabtree H. John,Cameron Neil S.,Roberge Hélène,Veres Teodor

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Limit-Defying μ-Total Analysis System: Achieving Part-Per-Quadrillion Sensitivity on a Hierarchical Optofluidic SERS Sensor;ACS Omega;2023-05-01

2. Study on ultra-high speed nano-grinding of monocrystalline copper with V-shaped diamond abrasive grains based on molecular dynamics method;Diamond and Related Materials;2021-01

3. Biopolymer nanostructures induced by plasma irradiation and metal sputtering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-08

4. Plasma Technology, Nanoengineering of Advanced Materials;Kirk-Othmer Encyclopedia of Chemical Technology;2012-04-13

5. Patterning of Polymeric Materials for Biological Applications;Polymer Science: A Comprehensive Reference;2012

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