Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study

Published:2024 Issue:15 Volume:26 Page:11597-11603
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Chowdhury Tanzia¹^ORCID,Khumaini Khabib¹²^ORCID,Hidayat Romel¹³^ORCID,Kim Hye-Lee¹³^ORCID,Lee Won-Jun¹³^ORCID

Affiliation:

1. Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul, 05006, Republic of Korea

2. Department of Chemistry, Universitas Pertamina, Jakarta 12220, Indonesia

3. Metal-organic Compounds Materials Research Center, Sejong University, Seoul, 05006, Republic of Korea

Abstract

For the chemisorption of SiCl4 on silicon nitride, three sequential reactions forming NH3+Cl− were simulated using an NH2/NH-terminated slab model.

Funder

Korea Basic Science Institute

Korea Evaluation Institute of Industrial Technology

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/CP/D3CP05799B

Reference42 articles.

1. Atomic Layer Deposition of SiN for spacer applications in high-end logic devices

2. Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition

3. Review of Semiconductor Flash Memory Devices for Material and Process Issues

4. Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

5. Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP