Review of Semiconductor Flash Memory Devices for Material and Process Issues-Reference-Cited by-同舟云学术

Review of Semiconductor Flash Memory Devices for Material and Process Issues

Published:2022-05-22 Issue: Volume: Page:2200659
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Advanced Materials

Author:

Kim Seung Soo¹²,Yong Soo Kyeom¹²,Kim Whayoung¹³,Kang Sukin¹,Park Hyeon Woo¹,Yoon Kyung Jean⁴,Sheen Dong Sun³,Lee Seho³,Hwang Cheol Seong¹^ORCID

Affiliation:

1. Department of Materials Science and Engineering and Inter‐University Semiconductor Research Center Seoul National University Seoul 08826 Republic of Korea

2. Samsung Electronics Hwaseong Gyeonggi‐do 18448 Republic of Korea

3. SK Hynix Inc. Icheon Gyeonggi‐do 17336 Republic of Korea

4. Data Platforms Group Intel Santa Clara CA 95054 USA

Funder

National Research Foundation of Korea

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.202200659

Reference140 articles.

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