Thermodynamic insights into interfacial interactions in TiN/amorphous Al2O3 heterostructures: ab initio molecular dynamics and first principles investigation-Reference-Cited by-同舟云学术

Thermodynamic insights into interfacial interactions in TiN/amorphous Al2O3 heterostructures: ab initio molecular dynamics and first principles investigation

Published:2020 Issue:22 Volume:7 Page:4347-4356
ISSN:2052-1553
Container-title:Inorganic Chemistry Frontiers
language:en
Short-container-title:Inorg. Chem. Front.

Author:

Park Hwanyeol¹²³⁴⁵,Han Dong-Hoon⁶⁷⁸⁹,Lim Hong Taek⁶⁷⁸⁹,Yoon Euijoon¹²³⁴¹⁰,Lee Gun-Do¹²³⁴¹⁰^ORCID

Affiliation:

1. Department of Materials Science and Engineering

2. Seoul National University

3. Seoul 151-744

4. Korea

5. Memory Thin Film Technology Team

6. Memory Metal Technology Team

7. Giheung Hwaseong Complex

8. Samsung Electronics

9. South Korea

10. Research Institute of Advanced Materials and Inter-university Semiconductor Research Center

Abstract

The nature and the mechanism of the film interaction with the substrate at the film/substrate interface are still far from being fully understood.

Funder

Korea Institute of Science and Technology Information

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Samsung

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/QI/D0QI00839G

Reference45 articles.

1. The effect of thermal treatment induced inter-diffusion at the interfaces on the charge trapping performance of HfO2/Al2O3 nanolaminate-based memory devices

2. Novel gate-all-around polycrystalline silicon nanowire memory device with HfAlO charge-trapping layer

3. Improved Operation Characteristics for Nonvolatile Charge-Trapping Memory Capacitors with High- κ Dielectrics and SiGe Epitaxial Substrates

4. Reliability limits for the gate insulator in CMOS technology

5. Overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles study

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