Accurate electronics calibration for particle backscattering spectrometry-Reference-Cited by-同舟云学术

Accurate electronics calibration for particle backscattering spectrometry

Published:2015 Issue:7 Volume:7 Page:3096-3104
ISSN:1759-9660
Container-title:Analytical Methods
language:en
Short-container-title:Anal. Methods

Author:

Colaux Julien L.¹²³,Jeynes Chris¹²³

Affiliation:

1. University of Surrey Ion Beam Centre

2. Guildford GU2 7XH

3. UK

Abstract

Rutherford backscattering spectrometry (RBS) is a non-destructive thin film analytical technique of the highest absolute accuracy which, when used for elemental depth profiling, depends at first order on the gain of the pulse-height spectrometry system.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Chemical Engineering,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/AY/C4AY02988G

Reference31 articles.

1. High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples

2. Certified ion implantation fluence by high accuracy RBS

3. “Total IBA” – Where are we?

4. Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

5. RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon – A multi-method approach to characterize and certify a reference material

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