The effect of RF plasma power on remote plasma sputtered AZO thin films-Reference-Cited by-同舟云学术

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The effect of RF plasma power on remote plasma sputtered AZO thin films

Published:2022-07 Issue: Volume:442 Page:128402
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Bussell B.C.,Gibson P.N.,Lawton J.,Couture P.,Sharpe M.K.,England J.,Hinder S.J.,Stolojan V.,Thornley S.A.,Baker M.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference73 articles.

1. Room temperature deposition of homogeneous, highly transparent and conductive Al-doped ZnO films by reactive high power impulse magnetron sputtering;Mickan;Sol. Energy Mater. Sol. Cells,2016

2. Low temperature deposition of highly transparent and conducting Al-doped ZnO films by RF magnetron sputtering;Misra;J. Alloys Compd.,2017

3. Effect of Al doping on performance of ZnO thin film transistors;Dong;Appl. Surf. Sci.,2018

4. Nonlinear optical parameters of nanocrystalline AZO thin film measured at different substrate temperatures;Jilani;Phys. B Condens. Matter.,2016

5. InGaN/GaN ultraviolet LED with a graphene/AZO transparent current spreading layer;Lin;Opt. Mater. Express.,2018

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1. XPS depth profiling of nano-layers by a novel trial-and-error evaluation procedure;Scientific Reports;2024-08-09

2. Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning;Journal of Vacuum Science & Technology A;2024-07-22

3. Orientation-dependent Electrical and Optical Characteristics of non-epitaxial Al-doped ZnO thin films;Ceramics International;2024-07

4. Synthesis of transparent tin-doped indium oxide (ITO)-containing glass-ceramic coating by the sol-gel route for UV/NIR-shielding;Optical Materials;2024-07

5. Femtosecond laser ablation (fs-LA) XPS – A novel XPS depth profiling technique for thin films, coatings and multi-layered structures;Applied Surface Science;2024-05

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