Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry
Author:
Affiliation:
1. University of Surrey Ion Beam Centre, Guildford, England
2. Instituto Superior Técnico/ITN, Universidade Técnica de Lisboa, Sacavém, Portugal
3. Institute for Particle and Nuclear Physics, Wigner Research Centre for Physics, Budapest, Hungary
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac300904c
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