C-Axis oriented crystalline IGZO thin-film transistors by magnetron sputtering
Author:
Affiliation:
1. Guangdong Research Center for Interfacial Engineering of Functional Materials
2. Shenzhen Key Laboratory of Special Functional Materials
3. College of Materials Science and Engineering
4. Shenzhen University
5. Shenzhen 518060
Abstract
We successfully fabricated c-axis oriented crystalline IGZO films at room temperature by magnetron sputtering.
Funder
National Natural Science Foundation of China
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/TC/C7TC00193B
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