Affiliation:
1. Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus UAB, Bellaterra 08193, Barcelona, Spain
Abstract
PLD of ferroelectric HfO2 done under a mixed Ar and O2 atmosphere allows the reduction of the PLD plasma energy, resulting in fewer defects and an increase of the ferroelectric polarization of around 50% compared to films grown by conventional PLD.
Funder
Departament d'Universitats, Recerca i Societat de la Informació
Fundación BBVA
China Scholarship Council
Ministerio de Ciencia e Innovación
Consejo Superior de Investigaciones Científicas
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Cited by
14 articles.
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