An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films-Reference-Cited by-同舟云学术

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An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films

Published:2018 Issue:6 Volume:42 Page:4553-4558
ISSN:1144-0546
Container-title:New Journal of Chemistry
language:en
Short-container-title:New J. Chem.

Author:

Du Liyong¹²³⁴⁵,Yu Shaoshan¹²³⁴⁵,Liu Xinfang⁶⁷⁸⁹¹⁰,Ding Yuqiang¹²³⁴⁵^ORCID

Affiliation:

1. International Joint Research Center for Photoresponsive Molecules and Materials

2. School of Chemical and Material Engineering

3. Jiangnan University

4. Wuxi 214122

5. China

6. College of Chemistry and Chemical Engineering

7. and Henan Key Laboratory of Function-Oriented Porous Materials

8. Luoyang Normal University

9. Luoyang

10. P. R. China

Abstract

An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry,Catalysis

Link

http://pubs.rsc.org/en/content/articlepdf/2018/NJ/C8NJ00062J

Reference68 articles.

1. Plasma Enhanced Chemical Vapor Deposition of Manganese on Low-k Dielectrics for Copper Diffusion Barrier Application

2. Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin films

3. Diffusion barrier property of MnSixOy layer formed by chemical vapor deposition for Cu advanced interconnect application

4. Formation of a manganese oxide barrier layer with thermal chemical vapor deposition for advanced large-scale integrated interconnect structure

5. Formation behavior and adhesion property of metallic Mn layer on porous SiOC by chemical vapor deposition

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1. Targeting Manganese Amidinate and ß‐Ketoiminate Complexes as Precursors for Mn‐Based Thin Film Deposition;Chemistry – A European Journal;2024-07-04

2. Synthesis, characterization, and thermal properties of a 2-isopropyl-aminopyridine adduct of cobalt(II) chloride and its potential as a CVD precursor for cobalt-based films;Inorganic Chemistry Communications;2022-12

3. Syntheses, Crystal Structure, and Magnetic Property of a New Mn(II) Complex with an Aromatic N-heterocyclic Tetracarboxylic Acid Ligand;Russian Journal of Coordination Chemistry;2020-05

4. A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films;Polyhedron;2018-12

5. Synthesis, characterization, and thermal properties of cobalt(ii) compounds with guanidinate ligands;New Journal of Chemistry;2018

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