Rubidium containing thin films by atomic layer deposition
Author:
Affiliation:
1. Department of Chemistry
2. University of Oslo
3. Norway
Abstract
Filling in the gaps of the ALD periodic table: rubidium containing films deposited for the first time.
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/DT/C7DT03753H
Reference15 articles.
1. Functional Perovskites by Atomic Layer Deposition - An Overview
2. An overview of molecular layer deposition for organic and organic–inorganic hybrid materials: mechanisms, growth characteristics, and promising applications
3. Atomic Layer Deposition of Noble Metals and Their Oxides
4. Atomic layer deposition of (K,Na)(Nb,Ta)O3 thin films
5. All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition
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