Consistency and reproducibility in atomic layer deposition-Reference-Cited by-同舟云学术

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Consistency and reproducibility in atomic layer deposition

Published:2020-03 Issue:2 Volume:38 Page:020804
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Sønsteby Henrik H.¹²^ORCID,Yanguas-Gil Angel¹^ORCID,Elam Jeffrey W.¹³^ORCID

Affiliation:

1. Applied Materials Division, Argonne National Laboratory, Argonne, Illinois 60439

2. Department of Chemistry, University of Oslo, Blindern, 0315 Oslo, Norway

3. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439

Funder

U.S. Department of Energy

Norges Forskningsråd

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5140603

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