Effect of energy per atom (E/n) on the Ar gas cluster ion beam (Ar-GCIB) and O2+ cosputter process
Author:
Affiliation:
1. Department of Materials Science and Engineering
2. National Taiwan University
3. Taipei 106
4. Taiwan
5. Research Center for Applied Science
6. Academia Sinica
7. Taipei 115
Abstract
With optimization, GCIB-O2+ cosputter is a promising technique for preserving molecular structures during ion sputtering and successfully profiled soft materials.
Funder
Academia Sinica
Ministry of Science and Technology, Taiwan
Publisher
Royal Society of Chemistry (RSC)
Subject
Electrochemistry,Spectroscopy,Environmental Chemistry,Biochemistry,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/AN/C8AN02452A
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1. Atomic and Molecular Imaging at the Single-Cell Level with TOF-SIMS
2. Improved Molecular Imaging in Rodent Brain with Time-of-Flight-Secondary Ion Mass Spectrometry Using Gas Cluster Ion Beams and Reactive Vapor Exposure
3. A New Method and Mass Spectrometer Design for TOF-SIMS Parallel Imaging MS/MS
4. 3D ToF-SIMS Imaging of Polymer Multilayer Films Using Argon Cluster Sputter Depth Profiling
5. Interfacial Micropore Defect Formation in PEDOT:PSS-Si Hybrid Solar Cells Probed by TOF-SIMS 3D Chemical Imaging
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