Effect of the molecular weight on the depth profiling of PMMA thin films using low‐energy Cs + sputtering-Reference-Cited by-同舟云学术

Effect of the molecular weight on the depth profiling of PMMA thin films using low‐energy Cs + sputtering

Published:2021-07-21 Issue:10 Volume:53 Page:884-892
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf Interface Anal

Author:

Ben Hadj Mabrouk Amal¹^ORCID,Licitra Christophe¹^ORCID,Chateauminois Antoine²^ORCID,Veillerot Marc¹^ORCID

Affiliation:

1. Univ. Grenoble Alpes CEA, Leti Grenoble France

2. Soft Matter Science and Engineering Laboratory (SIMM) PSL Research University, UPMC Univ. Paris 06, Sorbonne Universités, ESPCI Paris, CNRS 75231 Paris Cedex 05 France

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.6991

Reference36 articles.

1. Polymer surface structures determined using ToF-SIMS

2. Determination of chemical composition in multilayer polymer film using ToF-SIMS

3. Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams

4. Ar cluster sputtering of polymers: effects of cluster size and molecular weights

5. Molecular Depth Profiling with Cluster Ion Beams

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