Nanovoid-driven highly crystalline aluminum nitride and its application in solar-blind UV photodetectors

Author:

Lee Moonsang1234ORCID,Son Hyungbin5674,Lee Hae-Yong894,Moon Joonhee1234,Kim Heejin1234,Park Ji-In10234,Liu Zheng111213ORCID,Hahm Myung Gwan1415164,Yang Mino17184,Kim Un Jeong1920214

Affiliation:

1. Research Center for Materials Analysis

2. Korea Basic Science Institute

3. Daejeon 34133

4. Republic of Korea

5. School of Integrative Engineering

6. Chung-Ang University

7. Seoul 06974

8. LumiGNtech Co. Ltd.

9. Gwangmyeong-si

10. Center for Research Equipment

11. School of Materials Science & Engineering

12. Nanyang Technological University

13. Singapore

14. Department of Materials Science and Engineering

15. Inha University

16. Incheon 22212

17. Korea Basic Science Institute Seoul

18. Seoul 02841

19. Imaging Device Laboratory

20. Samsung Advanced Institute of Technology

21. Suwon 443-803

Abstract

Surface treatment in AlN layer introduces nanovoids, which suppressed the propagation of threading dislocations to the surface, thus encouraging the growth of high crystalline AlN.

Funder

Korea Basic Science Institute

National Research Foundation of Korea

Inha University

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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