Affiliation:
1. Department of Chemistry and Chemical Biology
2. Harvard University
3. Cambridge
4. USA
5. Harvard John A. Paulson School of Engineering and Applied Sciences
Funder
National Science Foundation
Defense Advanced Research Projects Agency
U.S. Department of Energy
Office of Naval Research
Publisher
Royal Society of Chemistry (RSC)
Reference42 articles.
1. A. C. Jones and M. L.Hitchman , Chemical Vapour Deposition: Precursors, Processes and Applications , RSC Publishing , Cambridge , 2009
2. Atomic Layer Deposition: An Overview
3. R. G. Gordon , in Atomic Layer Deposition for Semiconductors , ed. C. S. Hwang and C. Y. Yoo , Springer US , New York , 2014 , p. 15
4. A brief review of atomic layer deposition: from fundamentals to applications
5. M. Putkonen and L.Niinistö , in Precursor Chemistry of Advanced Materials , ed. R. A. Fischer , Springer Berlin Heidelberg , Berlin, Heidelberg , 2005 , p. 125
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